Method of fabrication of optoelectric devices by ion...

H - Electricity – 01 – S

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H01S 3/02 (2006.01) H01S 3/19 (1980.01)

Patent

CA 1088193

A METHOD OF FABRICATION OF OPTOELECTRONIC DEVICES BY ION IMPLANTATION Abstract of the Disclosure At least a binary semiconductor substrate is selected from the group comprising the alloys of the elements of columns II and VI and the alloys of the elements of columns III and V of the Periodic Table of Elements and having a first type of conductivity. One face of the substrate is subjected to ion implantation with impurities which are capable of endowing the sub- strate with a second type of conductivity to a given depth. A surface layer is removed from the implanted face of the substrate to a depth which has the effect of eliminating the greater part of the defects produced by the implantation but not of eliminating the greater part of the implanted impurities. -1-

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