Method of finely polishing planar optical elements

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B24B 13/00 (2006.01) B24B 1/04 (2006.01) B24B 19/22 (2006.01) B24B 31/00 (2006.01)

Patent

CA 2111010

ABSTRACT OF THE DISCLOSURE The present invention relates to a method of finely polishing an optically transparent surface with a polishing liquid containing abrasive particles. The polishing mixture, while subjected to ultrasonic agitation, is contacted with an optically transparent surface under conditions effective to polish finely that surface. The abrasive particles typically have a size of up to 1 micron. This process is particularly useful in smoothing the optically transparent surfaces which define cavities or sidewalls for planar optical elements in optical waveguides.

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