Method of forming a variable width channel

Details Method of forming a variable width channel Method of forming a variable width channel

G - Physics

03

C

356/151, 345/32

G03C 5/00 (2006.01) G03F 7/00 (2006.01) H01S 5/12 (2006.01) H01S 5/223 (2006.01)

Patent

CA 1269748

ABSTRACT OF THE DISCLOSURE A method of forming a variable width channel in a body comprises the steps of forming a surface grating having a photoresist layer thereon. The photoresist layer has a plurality of depressions and a planar photomask is then positioned over the photoresist layer. The photoresist layer is subsequently exposed and developed and due to the divergence of light into the depressions covered by the photomask, forms a variable width opening. A portion of the body exposed in the opening is removed to form a channel with a sidewall having a surface contour corresponding to an edge of the opening.

510918

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