Method of forming doped dielectric layers utilizing reactive...

Details Method of forming doped dielectric layers utilizing reactive... Method of forming doped dielectric layers utilizing reactive...

H - Electricity

01

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204/96.31, 148/2

H01L 21/316 (2006.01) C23C 16/40 (2006.01) C23C 16/507 (2006.01) H01L 21/225 (2006.01) H01L 27/00 (2006.01) H01L 33/00 (2006.01)

Patent

CA 1014830

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