C - Chemistry – Metallurgy – 09 – K
Patent
C - Chemistry, Metallurgy
09
K
C09K 3/14 (2006.01) C01F 17/00 (2006.01) C01G 23/04 (2006.01) C01G 23/053 (2006.01) C03C 19/00 (2006.01) C09C 1/36 (2006.01) C09C 1/68 (2006.01) C09C 3/06 (2006.01) C09G 1/02 (2006.01)
Patent
CA 2467030
The present invention provides a process for producing particles suitable for use as abrasives in chemical-mechanical polishing slurries. The process according to the invention includes adding a crystallization promoter such as Ti[OCH(CH3)2)]4 to an aqueous cerium salt solution, adjusting the pH of the solution to higher than 7.0 using one or more bases, and subjecting the solution to hydrothermal treatment at a temperature of from 90°°C to about 500°°C to produce the particles.
La présente invention concerne un procédé de production de particules appropriées pour être utilisées comme abrasifs dans des bouillies de polissage chimico-mécaniques (CMP). Ledit procédé de cette invention consiste à ajouter un promoteur de cristallisation, tel que Ti[OCH(CH¿3?)¿2?)]¿4?, à une solution aqueuse de sel de cérium, à ajuster le pH de la solution à plus de 7,0 au moyen d'au moins une base, et à soumettre la solution à un traitement hydrothermique à une température comprise entre 90·C et environ 500·C afin de produire les particules.
Feng Xiangdong
Her Yie-Shein
Ferro Corporation
Moffat & Co.
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