Method of forming semiconductor device with smooth flat surface

Details Method of forming semiconductor device with smooth flat surface Method of forming semiconductor device with smooth flat surface

H - Electricity

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148/2.55, 148/2.

H01L 33/00 (2006.01) C30B 19/00 (2006.01) H01L 21/208 (2006.01) H01L 21/306 (2006.01)

Patent

CA 955832

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