Method of forming si-o containing coatings

Details Method of forming si-o containing coatings Method of forming si-o containing coatings

B - Operations, Transporting

05

D

B05D 3/04 (2006.01) C04B 35/622 (2006.01) C08G 77/12 (2006.01) C09D 183/04 (2006.01) C23C 18/12 (2006.01)

Patent

CA 2117591

Disclosed is a method for forming improved Si-O containing coatings on electronic substrate. The method comprises converting hydrogen silsesquioxane resin into a Si-O containing ceramic coating in the presence of hydrogen gas. The resultant coatings have improved properties such as stable dielectric constants.

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