Method of forming single-crystalline thin film

Details Method of forming single-crystalline thin film Method of forming single-crystalline thin film

C - Chemistry, Metallurgy

30

B

C30B 23/04 (2006.01) C30B 23/02 (2006.01)

Patent

CA 2143265

A thin film strongly orienting specific crystal axes is deposited on a polycrystalline or amorphous base material in accordance with laser deposition in a simpler device through a simpler process. A target is irradiated with a laser beam, for forming a thin film in accordance with laser ablation of depositing a substance scattered from the target on a base material. In order to form the thin film, prepared are conditions capable of forming a film orienting a specific crystal axis substantially perpendicularly to the base material in substantially parallel arrangement of the target and the base material. Under the conditions, a film is deposited on the base material which is inclined at a prescribed angle ~ with respect to the target. It is possible to deposit a film strongly orienting a specific crystal axis in a plane substantially parallel to the base material surface by inclining the base material under the specific film forming conditions.

Cette invention concerne le dépôt au laser d'une couche mince d'orientation marquée d'axes précis de cristaux sur un substrat polycristallin ou amorphe au moyen d'un dispositif simplifié et selon un procédé simplifié. Une cible est irradiée par un faisceau laser pour former une couche mince par transfert sur un substrat d'une substance arrachée de la cible par ablation laser. Afin de constituer la couche mince, on réalise des conditions propices à la formation d'une pellicule orientant des axes précis de cristaux sensiblement à angle droit au substrat, la cible et le substrat étant sensiblement parallèles. Dans ces conditions, une pellicule inclinée d'un angle prescrit par rapport à la cible est déposée sur le substrat. Il est possible de déposer une pellicule d'orientation marquée d'axes précis de cristaux dans un plan sensiblement parallèle au substrat en inclinant celui-ci dans des conditions précises de formation de pellicule.

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