Method of gas doping of vacuum evaporated epitaxial silicon...

Details Method of gas doping of vacuum evaporated epitaxial silicon... Method of gas doping of vacuum evaporated epitaxial silicon...

H - Electricity

01

L

148/2.8

H01L 21/203 (2006.01) C30B 23/02 (2006.01)

Patent

CA 950333

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