Method of integrating a semiconductor component with a...

Details Method of integrating a semiconductor component with a... Method of integrating a semiconductor component with a...

H - Electricity

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L

H01L 31/0232 (2006.01) G02B 6/122 (2006.01) G02B 6/42 (2006.01) H01L 21/20 (2006.01) H01L 33/00 (2006.01) H01S 3/025 (1990.01)

Patent

CA 2119421

ABSTRACT OF THE DISCLOSURE The invention relates to a method of fabricating an electro-optical device which comprises integrating a semiconductor component with a polymeric optical waveguide component. According to the invention, a semiconductor component obtained by epitaxial lift-off (ELO) is embedded in a waveguide device which in addition to a polymeric optical waveguide structure comprises an appropriate cavity. The invention further pertains to an integrated electro-optical device attainable by means of this ELO technique. Notably, it concerns an integrated electro-optical device in which the polymeric waveguide component and the semiconductor component are integrated on a substrate made of a different material from that of the semiconductor component, preferably a material with good heat dissipation, such as silicon. Preferably, the polymeric waveguide component comprises a polymer in which waveguide channels have been provided by bleaching.

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