H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 41/22 (2006.01) H03H 3/02 (2006.01) H03H 9/17 (2006.01) H04R 17/10 (2006.01) H01L 41/083 (2006.01)
Patent
CA 2642731
A method of isolating acoustic resonator devices with a piezoelectric material interposed between two conductors on a substrate is disclosed. Growth of piezoelectric material is limited to specified regions on the substrate during fabrication. The specified regions form isolated islands of piezoelectric material which are subsequently interconnected.
Barber Bradley Paul
Fetter Linus Albert
Zierdt Michael George
Kirby Eades Gale Baker
Lucent Technologies Inc.
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