Method of isolation for acoustic resonator devices

H - Electricity – 01 – L

Patent

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Details

H01L 41/22 (2006.01) H03H 3/02 (2006.01) H03H 9/17 (2006.01) H04R 17/10 (2006.01) H01L 41/083 (2006.01)

Patent

CA 2642731

A method of isolating acoustic resonator devices with a piezoelectric material interposed between two conductors on a substrate is disclosed. Growth of piezoelectric material is limited to specified regions on the substrate during fabrication. The specified regions form isolated islands of piezoelectric material which are subsequently interconnected.

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