Method of machining silicon nitride ceramics and silicon...

Details Method of machining silicon nitride ceramics and silicon... Method of machining silicon nitride ceramics and silicon...

B - Operations, Transporting

28

B

B28B 11/08 (2006.01) B24B 1/00 (2006.01) B24B 19/22 (2006.01)

Patent

CA 2073388

An industrially feasible method of grinding silicon nitride ceramics. The method provides a sufficiently smooth surface. Namely. the surface has a maximum height- roughness Rmax of 0.1 micron or less and a ten-point mean roughness Rmax of 0.05 micron. Further, with this method, surface damage can be repaired while grinding. The vertical cutting speed of a grinding wheel into a work should be within the range of 0.005 - 0.1 micron for each rotation of the working surface or the wheel and change linearly or stepwise. The horizontal machining speed should be within the range of 25 to 75 m/sec. With this arrangement, the contact pressure and grinding heat that generate between the work and the hard abrasive grains during grinding are combined. In other words. mechanical and thermal actions are combined.

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