Method of making a pressure sensor with a radially tensioned...

Details Method of making a pressure sensor with a radially tensioned... Method of making a pressure sensor with a radially tensioned...

G - Physics

01

L

G01L 7/08 (2006.01) G01L 9/12 (2006.01)

Patent

CA 2724097

A method of making a pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. A first body member and a second body member are preheat- treated. A flexible diaphragm formed from an annealed precipitation hardening material is disposed between the first and second body members. The body members are attached to the diaphragm such that a first fluid chamber is formed between the first body member and the diaphragm and a second fluid chamber is formed between the second body member and the diaphragm. The first and second body members and the diaphragm are treated to tension the diaphragm. Also provided is a pressure sensor made by the method.

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