H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/178
H01L 21/20 (2006.01) H01L 21/205 (2006.01)
Patent
CA 1090480
ABSTRACT : The invention relates to a method of manufacturing a semiconductor device in which a mixture consisting of at least two semicon- ductor materials and having an energy gap which is smaller than that of a substrate is deposited epitaxially on the substrate. According to the invention, the compo- sition of the mixture is determined during the deposition by means of measurement of the thermal emission. -10-
278299
N.v. Philips Gloeilampenfabrieken
Van Steinburg C.e.
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