Method of making and structure for a solid state ion...

Details Method of making and structure for a solid state ion... Method of making and structure for a solid state ion...

G - Physics

01

N

324/28.1

G01N 27/36 (2006.01) G01N 27/333 (2006.01)

Patent

CA 1127714

ABSTRACT A solid state ion concentration measuring electrode having the ion concentration measuring electrode structure formed by an outer ion sensitive layer deposited by RF sputtering on a substantially thermally matched supporting solid electrolyte layer. The reference electrode is similarly formed by depositing an outer layer of glass onto a supporting solid electrolyte layer by RF sputtering with the temperature expansion of the glass and supporting solid electrolyte structure being selected to produce a differen- tial expansion causing random cracking of the glass layer during temperature cycling of the reference electrode. A combination structure is provided wherein the ion concentra- tion measuring electrode and the reference electrode are combined in an integrated package. A thermal compensating element may also be included in the integrated package.

317921

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