Method of making co-fired, multilayer substrates

Details Method of making co-fired, multilayer substrates Method of making co-fired, multilayer substrates

C - Chemistry, Metallurgy

04

B

C04B 41/88 (2006.01) C04B 41/51 (2006.01) H01L 21/48 (2006.01) H05K 1/09 (2006.01) H05K 3/46 (2006.01)

Patent

CA 2113451

2113451 9304998 PCTABS00020 Heat multilayer aluminum nitride greenware, a composite of layers of aluminum nitride green tape having refractory metal ink pattenrs deposited thereon, in a nonoxidizing atmosphere, at atmospheric pressure to effect liquid phases sintering of both the aluminum nitride greenware and the refractory metal ink. The resultant co-fired structure is substantially free of warpage and has satisfactory thermal conductivity, surface finish, mechanical properties and resistance to delamination.

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