C - Chemistry – Metallurgy – 25 – D
Patent
C - Chemistry, Metallurgy
25
D
C25D 13/02 (2006.01) G01N 27/12 (2006.01)
Patent
CA 2267881
A process is disclosed for forming finely porous solid layers used in fabricating gas and humidity sensors, which comprises electrophoretically depositing submicron- sized particles of the said solid onto a conductive substrate from a stable or semi- stable suspension and a subsequent heat treatment. The process readily affords making of a fast resistive gas sensor comprising a finely textured porous semiconductor film and at least two ohmic contacts. In a preferred embodiment the said porous layer is deposited onto a shaped article of an alloy containing substantial amounts of aluminum, chromium and iron, where a native aluminum oxide film insulates it from the said semiconductor layer after the deposition. The process also facilitates the making of finely porous multi-layer structures for more sophisticated gas sensors.
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