H - Electricity – 01 – L
Patent
H - Electricity
01
L
96/249
H01L 39/22 (2006.01) H01L 39/24 (2006.01)
Patent
CA 1208960
ABSTRACT OF THE DISCLOSURE During the manufacture of Josephson superconducting devices, it is necessary to provide on a substrate a base electrode, a counter electrode and a small tunnel barrier area therebetween, A novel method of making all three of these active elements in the same vacuum chamber without having to remove the substrate from the vacuum chamber is provided so that the tunnel barrier area is accurately made to a predetermined size and without the danger of contamination. The novel structure is made as a substantially planarized laminate in the vacuum chamber and the tunnel barrier area is defined in a supplemental step.
435744
Flannery William E.
Josephs Richard M.
Stein Barry F.
Wang Tsing-Chow
Young Peter L.
Fetherstonhaugh & Co.
Sperry Corporation
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