Method of making optical replicas by stamping in photoresist...

Details Method of making optical replicas by stamping in photoresist... Method of making optical replicas by stamping in photoresist...

G - Physics

03

F

G03F 7/00 (2006.01)

Patent

CA 2336467

Optical structures are replicated in photoresist on a substrate using a stamp. The transfer of the pattern into the liquid photoresist and the provision on the substrate can be achieved using manual pressures. Various techniques may be used to remove air from the liquid photoresist. The stamp is removed once the liquid photoresist is fully solidified. These structures in solidified photoresist may serve as optical elements or may be accurately transferred into the substrate. The stamp may be for an entire wafer.

L'invention concerne la réplique de structures optiques dans une photorésine sur un substrat grâce à une matrice de pressage. On peut effectuer le transfert du motif dans la photorésine liquide et sur le substrat par une pression manuelle. On peut utiliser plusieurs techniques pour éliminer l'air de la photorésine liquide. On retire la matrice de pressage dès que la photorésine liquide est totalement solidifiée. Ces structures dans de la photorésine solidifiée peuvent servir d'éléments optiques ou peuvent être transférées avec précision dans le substrat. La matrice de pressage peut servir pour une tranche entière.

Affiliated with

Also associated with

Rating

Method of making optical replicas by stamping in photoresist... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making optical replicas by stamping in photoresist..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making optical replicas by stamping in photoresist... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1850984