C - Chemistry – Metallurgy – 01 – B
Patent
C - Chemistry, Metallurgy
01
B
C01B 31/06 (2006.01) C23C 16/26 (2006.01) C23C 16/27 (2006.01) C30B 29/04 (2006.01)
Patent
CA 2112308
Diamond film with substantially no non-diamond carbon and a high thermal conductivity is deposited by means of a direct current arc jet apparatus with a substrate temperature below about 975 degrees Celsius, an arc power of between about 20 and 40 kw. a pressure of about 12 torr, and an enthalpy greater than 30 from a activated gas jet fed with hydrogen and methane, the methane being supplied at a concentration of less than 0.07%. The resulting material has a high transparency and thermal conductivity. Also disclosed is the use of the diamond material made by the present method for cutting tool applications, particularly milling.
Bigelow Louis K.
Cann Gordon L.
Gray Kevin J.
Lu Grant
Simpson Matthew A.
Gowling Lafleur Henderson Llp
Norton Company
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