G - Physics – 01 – P
Patent
G - Physics
01
P
G01P 15/125 (2006.01) G01P 15/18 (2006.01)
Patent
CA 2610185
The present invention relates to measuring devices used in measuring acceleration and, more precisely, to capacitive acceleration sensors. The object of the invention is to provide an improved method of manufacturing a capacitive acceleration sensor, and to provide a capacitive acceleration sensor, which is applicable for use in small capacitive acceleration sensor solutions, and which, in particular, is applicable for use in small and extremely thin capacitive acceleration sensor solutions measuring acceleration in relation to several axes.
La présente invention concerne des dispositifs servant à mesurer l~accélération et, plus précisément, des capteurs d~accélération capacitifs. L~objet de l~invention consiste à fournir un meilleur procédé de fabrication d~un capteur d~accélération capacitif, et à fournir un capteur d~accélération capacitif dont l~utilisation peut s~appliquer, en particulier, à des solutions de détection de petite taille et très minces permettant de mesurer l~accélération par rapport à plusieurs axes.
Bereskin & Parr Llp/s.e.n.c.r.l.,s.r.l.
Vti Technologies Oy
LandOfFree
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