Method of manufacturing an optical detection device

Details Method of manufacturing an optical detection device Method of manufacturing an optical detection device

G - Physics

01

N

G01N 21/64 (2006.01) G01N 21/55 (2006.01)

Patent

CA 2749300

Method for manufacturing an optical detection device comprising the operation of producing a plurality of metal nanospheres on a substrate (2). The process is characterised in that it also comprises the following operations: - producing (100) on the substrate (2) a plurality of lithographic nanostructures (4a, 4b, 4c) capable of receiving the said met-al nanospheres, - performing (102) a self-aggregative deposition of at least one metal in such a way as to create a respective metal nanosphere in each lithographic nanostructure (4a, 4b, 4c).

La présente invention concerne un procédé de fabrication d'un dispositif de détection optique comprenant l'opération consistant à produire une pluralité de nanosphères métalliques sur un substrat (2). Ce procédé est caractérisé en ce qu'il comprend également les opérations suivantes : - production (100), sur le substrat (2), d'une pluralité de nanostructures obtenues par lithographie (4a, 4b, 4c) et capables de recevoir lesdites nanosphères métalliques, - mise en uvre (102) d'un dépôt auto-agrégatif d'au moins un métal de façon à entraîner la formation d'une nanosphère constituée dudit métal dans chaque nanostructure obtenue par lithographie (4a, 4b, 4c).

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