Method of manufacturing an optical stripline waveguide for...

G - Physics – 02 – B

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G02B 6/10 (2006.01) C30B 25/06 (2006.01) G02B 6/12 (2006.01) G02B 6/122 (2006.01) G02F 1/095 (2006.01) H01F 10/24 (2006.01)

Patent

CA 1291634

ABSTRACT: Method of manufacturing an optical stripline waveguide for non-reciprocal optical components. A method of manufacturing an optical stripline waveguide for use in non-reciprocal optical components, in which a monocrystalline waveguide strip having a refractive index n2, which is surrounded by material with a lower refractive index n1, is provided on a monocrystalline substrate, the waveguide strip and the material surrounding it being deposited on a substrate by means of RF cathode sputtering (sputter epitaxy) in an inert gas plasma, making use of a target which contains mainly iron garnet phase, together with other phases with an almost equal sputte- ring rate, the crystal lattice of said substrate being locally disturbed in the surface regions where no wave- guide strip is to be grown, thereby forming a lattice disorder. Figure 7.

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