G - Physics – 11 – B
Patent
G - Physics
11
B
G11B 9/00 (2006.01) G01B 5/20 (2006.01)
Patent
CA 2079249
A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.
Procédé de fabrication de mécanisme d'entraînement comportant, sur un même substrat, une première partie constituée d'une couche piézoélectrique disposée entre deux couches électrodes, et un circuit contigu à ladite première partie qu'il entraîne. Le procédé de cette invention prévoit la fabrication du mécanisme en deux étapes, le circuit étant fabriqué en premier.
Kawasaki Takehiko
Nakayama Masaru
Shimada Yasuhiro
Suzuki Yoshio
Takamatsu Osamu
Canon Kabushiki Kaisha
Ridout & Maybee Llp
LandOfFree
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