Method of manufacturing electron-emitting device, electron...

Details Method of manufacturing electron-emitting device, electron... Method of manufacturing electron-emitting device, electron...

H - Electricity

01

J

H01J 9/00 (2006.01) H01J 9/02 (2006.01) H01J 31/10 (2006.01)

Patent

CA 2138488

An electron-emitting device comprising a pair of device electrodes and an electroconductive film including an electron-emitting region is manufactured by a method comprising a process of forming an electroconductive film including steps of forming a pattern on a thin film containing a metal element on the basis of a difference of chemical state, and removing part of the thin film on the basis of the difference of chemical state.

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