Method of manufacturing fluidic angular rate sensor

Details Method of manufacturing fluidic angular rate sensor Method of manufacturing fluidic angular rate sensor

G - Physics

01

P

26/201

G01P 9/00 (2006.01) G01P 3/44 (2006.01)

Patent

CA 1302693

Abstract of the Disclosure A method of manufacturing a fluidic angular rate sensor of the type that fine wires such as tungsten wires are tensely spread over the heads of two pairs of metal supports which are mounted on a ceramic disc having fluid passage apertures, includes the steps of: plating a gold on the wires and fixedly spreading the wires over the metal supports by means of thermocompression bonding or the like; and heating the wires in a predetermined atmosphere which allows the plated gold to be removed and the wires to be crystallized.

568005

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