Method of manufacturing silicon carbide crystals

Details Method of manufacturing silicon carbide crystals Method of manufacturing silicon carbide crystals

B - Operations, Transporting

66

C

148/3.6

B66C 23/62 (2006.01) B66F 3/22 (2006.01) C01B 31/36 (2006.01) C30B 29/36 (2006.01)

Patent

CA 900322

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