Method of manufacturing target of image pickup tube

Details Method of manufacturing target of image pickup tube Method of manufacturing target of image pickup tube

H - Electricity

01

J

316/13, 316/16

H01J 9/20 (2006.01) H01J 31/46 (2006.01)

Patent

CA 1120096

METHOD OF MANUFACTURING TARGET OF IMAGE PICKUP TUBE Abstract of the Disclosure The specification discloses a method of manufacturing a target of an image pickup tube. The method includes the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a layer on at least a porting adapted to constitute an image area of the image pickup tube, the layer being sub- stantially insoluble in etching liquid used for etching an insulating layer adapted to become inter-layer insulator in a double layered interconnection structure; forming, after the formation of the layer, an insulating layer adapted to become the inter-layer insulator; removing a predetermined portion of the insulating layer adapted to become the inter-layer insulator; removing the layer together with the insulating layer located thereon; forming bus bars and forming a photo- conductive layer on the plurality of groups of the transparent conductive signal electrodes. This invention provides an excellent method for mass production and produces a target having good characteristics.

321646

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