Method of obtaining accurate compositional information of...

G - Physics – 01 – N

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G01N 23/06 (2006.01) G01N 21/35 (2006.01) G01N 23/08 (2006.01)

Patent

CA 2062752

2062752 9100513 PCTABS00003 The present invention relates to a method, or process, for deriving compositional information from a multi-layer composition which includes the steps of obtaining multi-layer fractional composition information using a non-contact gauge such as an FTIR gauge (8); obtaining additional multi-layer composition information using a beta gauge (10); and, correcting for beta ray absorption differences among the layers of the muylti-layer composition by combining the multi-layer fractional composition information with the additional multi-layer composition information obtained using the beta gauge (10).

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