Method of oxidizing a silicon wafer

Details Method of oxidizing a silicon wafer Method of oxidizing a silicon wafer

C - Chemistry, Metallurgy

23

C

356/179

C23C 8/12 (2006.01) H01L 21/28 (2006.01) H01L 21/316 (2006.01) H01L 29/00 (2006.01) H01L 29/792 (2006.01)

Patent

CA 906681

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