Method of precisely adjusting the frequency of a...

B - Operations – Transporting – 05 – D

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356/200, 331/52,

B05D 3/06 (2006.01) B05D 1/20 (2006.01) H03H 3/04 (2006.01)

Patent

CA 1297172

ABSTRACT The frequency of a piezoelectric resonator is precisely adjusted using monomolecular layer(s) of a thermally stable, low stress, uniform insulating film deposited on the active area of the resonator. The method is particularly suitable for precisely adjusting the frequencies of high frequency (i.e., very thin) resonators, and the frequencies of lateral field resonators, without degrading stability.

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