Method of preparing high density metal oxide layers and the...

C - Chemistry – Metallurgy – 23 – F

Patent

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C23F 13/00 (2006.01) H01L 23/29 (2006.01)

Patent

CA 2698368

A method for the production of an oxide layer, involving oxidizing a metal surface, wherein the metal surface is electrically connected to an electronic control unit (ECU); wherein the metal oxide layer produced has an amount of metal present in said metal oxide layer that is higher than that present in a metal oxide layer produced by oxidizing the metal surface in the absence of the ECU; or oxidizing an oxidizable non-metallic conductive surface, wherein the oxidizable non- metallic conductive surface is electrically connected to an electronic control unit (ECU); wherein the oxide layer produced is denser than that produced by oxidizing the oxidizable non-metallic conductive surface in the absence of the ECU; and the metal oxide or oxide layers produced thereby.

Le procédé selon l'invention requiert l'oxydation d'une surface métallique, ladite surface métallique étant électriquement reliée à une unité de commande électronique (ECU). La couche d'oxyde métallique ainsi produite a une teneur en métal supérieure à celle d'une couche d'oxyde métallique produite par oxydation de la surface métallique en l'absence de l'ECU. Le procédé requiert en variante l'oxydation d'une surface conductrice oxydable non métallique, ladite surface étant électriquement reliée à une unité de commande électronique (ECU). La couche d'oxyde ainsi produite est plus dense qu'une couche produite en oxydant la surface conductrice oxydable non métallique en l'absence de l'ECU. L'invention concerne enfin l'oxyde métallique ou les couches d'oxyde produites par ce moyen.

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