C - Chemistry – Metallurgy – 07 – F
Patent
C - Chemistry, Metallurgy
07
F
C07F 7/30 (2006.01) C07C 257/10 (2006.01) C07F 5/06 (2006.01) C23C 16/18 (2006.01) C30B 25/00 (2006.01)
Patent
CA 2727509
A method of preparing an ultra-pure metal amidinate compound comprising using a microchannel device for synthesis in reacting a metal halide solution with a lithium amidinate solution to produce an ultra-pure alkylmetal compound for processes such as chemical vapor deposition.
Lipiecki Francis Joseph
Maroldo Stephen Gerard
Shenai-Khatkhate Deodatta Vinayak
Ware Robert A.
Gowling Lafleur Henderson Llp
Rohm And Haas Company
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