Method of preparing oxide superconducting film

H - Electricity – 01 – L

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204/96.3

H01L 39/24 (2006.01) C23C 14/00 (2006.01) C23C 14/08 (2006.01) C23C 14/22 (2006.01) C23C 14/28 (2006.01) C23C 14/30 (2006.01)

Patent

CA 2040070

In a method of preparing an oxide superconducting thin film having a composition of Y-Ba-Cu-O, for example, using laser ablation, which comprises the steps of applying a laser beam to a target containing components of an oxide superconductive material and depositing particles, being thereby scattered from the target, on a substrate, the oxygen gas flow rate during film deposition is set to be at least 50 SCCM, the oxygen gas pressure during film deposition is set to be 10 to 1000 mTorr, the distance between a target 9 and a substrate 10 is set to be 40 to 100 mm, the temperature of the substrate 10 is set to be 600 to 800°C, the energy density of a laser beam 7 on the surface of the target 9 is set to be at least 1 J/cm, and the laser pulse energy is set to be at least 10 mJ.

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