Method of preparing zinc oxide nanorods on a substrate by...

Details Method of preparing zinc oxide nanorods on a substrate by... Method of preparing zinc oxide nanorods on a substrate by...

H - Electricity

01

L

H01L 21/368 (2006.01)

Patent

CA 2649200

A method of preparing nanostructured zinc oxide layers on a substrate by chemical spray pyrolysis at moderate deposition temperatures from 350°C to 600 °C is disclosed. An aqueous or aqueous alcoholic solution comprising zinc chloride or zinc acetate as precursors is prepared and sprayed onto the preheated substrate so that the precursor reacts to form zinc oxide layer on the substrate. Thiourea or urea may be also added to the solution. Glass, silicon, or metal oxide covered glass can be used as the substrate.

L~invention concerne une méthode de préparation de couches d~oxyde de zinc nanostructurées sur un substrat par pyrolyse chimique par projection à des températures de dépôt modérées de 350 °C à 600 °C. Une solution aqueuse ou aqueuse alcoolique comprenant du chlorure de zinc ou de l~acétate de zinc comme précurseur est préparée et pulvérisée sur un substrat préchauffé de façon à ce que le précurseur réagisse pour former une couche d~oxyde de zinc sur le substrat. De la thiourée ou de l~urée peut également être ajoutée à la solution. On peut utiliser du verre, de la silice ou un verre recouvert d~oxyde métallique comme substrat.

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