B - Operations – Transporting – 01 – D
Patent
B - Operations, Transporting
01
D
B01D 67/00 (2006.01) B01D 39/16 (2006.01) B01D 69/02 (2006.01) B01D 71/02 (2006.01) G03F 7/00 (2006.01) G03F 7/12 (2006.01)
Patent
CA 2472615
The invention relates to a method of producing a sheet comprising through pores. The inventive method comprises the following steps, consisting in: preparing a sheet having a thickness of between 5µm and a few tens of micrometers which can be etched by means of a lithographic operation; producing a mask on one face of the sheet, said mask having an etching selectivity S of at least 5; depositing a layer of photosensitive resin on the aforementioned mask; creating through pores in the layer of resin by means of photolithography; through etching the mask through the pores in the resin layer; and through anisotropic etching the sheet from the pores in the mask in order to produce pores in the sheet which have a shape factor that is greater than 5. The invention is suitable for use in the production of micronic and submicronic filters.
Le procédé comprend les étapes suivantes : - préparation d'une feuille, d'une épaisseur de 5~m à quelques dizaines de micromètres, apte à être gravée par une opération lithographique; - réalisation sur une face de la feuille d'un masque présentant une sélectivité S de gravure au moins égale à 5; - dépôt sur le masque d'une couche photosensible; - réalisation de pores traversants dans la couche de résine, par photolithographie; - gravure traversante du masque à travers les pores de la couche de résine; - gravure anisotrope traversante de la feuille à partir des pores du masque pour réaliser dans la feuille des pores ayant un facteur de forme supérieur à 5. Application à la fabrication de filtres microniques et submicroniques.
Arnal Yves Alban-Marie
Lacoste Ana
Lagarde Thierry
Pelletier Jacques
Centre National de La Recherche Scientifique (cnrs)
Ogilvy Renault Llp/s.e.n.c.r.l.,s.r.l.
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