C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 33/02 (2006.01) H01L 21/20 (2006.01) H01L 21/762 (2006.01)
Patent
CA 2051154
A buried amorphous layer on a crystalline substrate shields a subsequently applied monocrystalline layer, which is transformed into a mixed-crystal or chemical compound, from transmission of lattice defects from the substrate even where the lattice parameters of the substrate and the monocrystalline layer are not matched.
Butz Rainer
Hollander Bernd
Mantl Siegfried
Forschungszentrum Julich Gmbh
Smart & Biggar
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