Method of producing films and jig for producing the same

G - Physics – 03 – F

Patent

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93/83

G03F 1/00 (2006.01) G03F 1/14 (2006.01)

Patent

CA 1320070

72689-2 ABSTRACT OF THE DISCLOSURE The invention concerns a method of producing protective films or the like used as protective covers for photomasks or reticles. To peel a thin film-off a substrate, a peeling jig constituted by a flexible annular frame with an adhesive applied thereon is pressed against the thin film applied on the substrate; a portion of the peeling jig is grabbed after the peeling jig and the thin film are adhered together; and the peeling jig and the film are peeled off the substrate. Before adhering the peeled film onto a side end surface of a pellicle frame, of the two edges of the pellicle frame, at least the edge formed by an inside surface thereof and the side end surface thereof is chamfered.

616276

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