Method of producing group iii nitride crystal, apparatus for...

Details Method of producing group iii nitride crystal, apparatus for... Method of producing group iii nitride crystal, apparatus for...

C - Chemistry, Metallurgy

30

B

C30B 29/38 (2006.01) C30B 9/10 (2006.01)

Patent

CA 2608102

In a method of producing a group III nitride crystal in which a melt holding vessel where a melt containing a group III metal and flux is held is accommodated in a reaction vessel and a group III nitride crystal is produced as a substance containing nitrogen is supplied from an outside to the reaction vessel through a pipe, the method includes a step of forming an accumulated part of a liquid in the pipe to thereby temporarily close the pipe before growing the group III nitride crystal in the melt holding vessel.

L'invention concerne un procédé de fabrication de cristaux de nitrure d'éléments du groupe III, comprenant : la mise en place, dans une cuve de réaction, d'un récipient à mélange contenant un mélange comprenant un métal du groupe III et un flux ; et l'introduction extérieure dans la cuve de réaction, au moyen d'une tuyauterie, d'une substance contenant de l'azote, une étape de formation d'une portion de résidence de liquide étant effectuée dans la tuyauterie afin de la fermer temporairement avec la portion résidence avant la croissance des cristaux de nitrure d'éléments du groupe III dans le récipient à mélange.

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