Method of producing iron oxide photo masks and iron oxide...

Details Method of producing iron oxide photo masks and iron oxide... Method of producing iron oxide photo masks and iron oxide...

B - Operations, Transporting

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C

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B05C 17/06 (2006.01) G03F 1/08 (2006.01)

Patent

CA 1110507

ABSTRACT: Method of producing photomasks of X-ray amorphous iron oxide (Fe203) by spraying a transpa- rent substrate at a temperature between 180 and 250°C with a solution of an hydrolysable iron salt in a polar organic solution or, in accordance with a variant of this method, at a temperature between 180 and 750°C with a solution of a hydrolysable iron salt which also contains a salt of a metal having a greater ion diameter. If temperatures above approxi- mately 230°C are used, the solvent may in the latter case also consist of water only. -10-

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