Method of producing photoelectric transducer

Details Method of producing photoelectric transducer Method of producing photoelectric transducer

H - Electricity

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H01L 31/18 (2006.01) C23C 14/00 (2006.01) C23C 16/509 (2006.01) H01L 27/14 (2006.01) H01L 27/146 (2006.01) H01L 31/20 (2006.01)

Patent

CA 1167951

ABSTRACT OF THE DISCLOSURE In the method of producing photoelectric transducers which method having processes for forming a photoconductive layer on a predetermined substrate which has an irregular surface. The method includes depositing the photoconductive layer in an atmosphere including at least plasma, the pre- determined substrate with irregular surface being disposed above a first electrode to which an electrode is opposed, and said photoconductive layer is formed while a negative potential is applied to the first electrode. This enables the photoconductive layer to be formed without breaks or steps, pinholes and so on due to the irregular surface, and therefore, it is possible to provide good photoelectric transducers having a small dark current.

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