G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 6/125 (2006.01) G02B 6/12 (2006.01)
Patent
CA 2163448
A reflection type waveguide device of the present invention has a bent waveguide and a reflecting section formed at a bent portion of the waveguide, and is manufactured by the step of forming a resist mask having a composite plane pattern on a substrate, the composite plane pattern including a plane pattern of the bent waveguide and a similar plane pattern which has an area at least greater than and is similar to a plane pattern of the reflecting section and which partly overlaps the bent portion of the plane pattern of the bent waveguide, and then performing dry etching to form a ridge having a plane pattern identical to the composite plane pattern on the substrate; and the step of forming a resist mask having a plane pattern identical to that of the reflecting section on the substrate, and then performing dry etching to form a recess having a plane pattern identical to that of the reflecting section in the substrate. The order of these steps is not particularly limited and may be reversed.
La présente invention concerne un dispositif guide d'ondes à réflexion comportant un guide d'ondes coudé et un élément réfléchissant au niveau du coude. Le procédé de production du guide d'ondes comporte les étapes suivantes: formation, sur un substrat du dispositif, d'un masque de résine photosensible à configuration plane combinée, et dans lequel la configuration plane du guide d'onde coudé et une autre configuration plane similaire à celle de l'élément réfléchissant mais de plus grande surface, se chevauchent partiellement au niveau du coude de la configuration plane du guide d'ondes coudé; exécution par gravure à sec d'une partie à nervures respectant la même configuration plane que la configuration plane combinée; réalisation d'un masque de résine photosensible sur le substrat du dispositif, selon la même configuration plane que celle de la partie réfléchissante; puis, par gravure à sec, réalisation sur le substrat du dispositif, d'un évidement ayant la même configuration plane que la partie réfléchissante.
Kamata Yoshiyuki
Mugino Akira
Yanagawa Hisaharu
Smart & Biggar
The Furukawa Electric Co. Ltd.
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