Method of stabilizing a wavelength of a laser beam and...

H - Electricity – 01 – S

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315/24

H01S 3/137 (2006.01) H01S 3/225 (2006.01)

Patent

CA 1313688

ABSTRACT A wavelength of a laser beam is stabilized by separating a part of the laser beam emitted from an oscillation wavelength changing type laser oscillator with first and second Fabry-Perot etalons; subjecting the separated laser beam to a spectroscopy analysis by a wavelength monitoring means to thereby determine an oscillation wavelength; controlling the first Fabry-Perot etalon by the determined oscillation wavelength so that the wavelength of the laser oscillator is stabilized; separating a part of the laser beam, measuring an output power of the laser beam by a power monitoring means and stabilizing the output of the laser oscillator by controlling the second Fabry-Perot etalon on the basis of the measured laser output.

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