Method of stabilizing silicon nitride passivating layers

Details Method of stabilizing silicon nitride passivating layers Method of stabilizing silicon nitride passivating layers

H - Electricity

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117/103.1

H01L 21/318 (2006.01) H01L 21/3105 (2006.01) H01L 21/314 (2006.01)

Patent

CA 966738

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