Method of storing semiconductor substrate

Details Method of storing semiconductor substrate Method of storing semiconductor substrate

H - Electricity

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356/116

H01L 21/02 (2006.01) H01L 21/673 (2006.01) H01L 21/68 (2006.01)

Patent

CA 1316273

ABSTRACT A method of storing a semiconductor substrate, by preserving a semiconductor substrate at a temperature not more than 10°C. After the surface of a semiconductor substrate is cleaned by etching or the like, the semiconductor substrate is put in a bag of a synthetic resin sheet having layer structure sandwiching.metal foil, an inert gas is introduced into the bag or the bag is brought into a vacuum state, and the bag is sealed, to be preserved at a temperature not more than 10°C.

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