Method of testing a two-dimensional pattern

Details Method of testing a two-dimensional pattern Method of testing a two-dimensional pattern

H - Electricity

04

N

354/57

H04N 7/18 (2006.01)

Patent

CA 1061467

ABSTRACT: A pattern to be tested and a reference pattern are each picked up in a respective pick-up device. The reference pattern is modified with respect to the pat- tern to be tested and comprises three types of pattern traces, i.e. narrow black traces, narrow bright traces and intermediate wide groy traces. Testing of the pat- tern is effected at the narrow traces only so that no critical problems occur in respect of positioning and scanning. - 18 -

231806

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