C - Chemistry – Metallurgy – 07 – F
Patent
C - Chemistry, Metallurgy
07
F
C07F 7/08 (2006.01) B01J 29/00 (2006.01) B01J 31/12 (2006.01) B01J 35/00 (2006.01) B01J 37/00 (2006.01) B01J 37/08 (2006.01) B01J 37/34 (2006.01) C08G 77/22 (2006.01) C08J 3/28 (2006.01)
Patent
CA 2583610
This invention relates to a chemical transformation of the bridging organic groups in metal oxide materials containing bridging organic groups, such as bridged organosilicas, wherein such a transformation greatly benefits properties for low dielectric constant (k) applications. A thermal treatment at specific temperatures is shown to cause a transformation of the organic groups from a bridging to a terminal configuration, which consumes polar hydroxyl groups. The transformation causes k to decrease, and the hydrophobicity to increase (through ~self-hydrophobization~). As a result of the bridge-terminal transformation, porous organosilica films are shown to have k < 2.0, E > 6 GPa, do not require additional chemical surface treatment for dehydroxylation (hydrophobicity).
La présente invention se rapporte à une transformation chimique des groupes organiques de pontage dans des matières à base d'oxydes métalliques contentant des groupes organiques de pontage, telles que des organosiliciés pontés. Une telle transformation recèle des propriétés particulièrement avantageuses pour des applications à faible constante diélectrique (k). Un traitement thermique à des températures spécifiques entraîne une transformation des groupes organiques, qui les fait passer d'une configuration de pontage à une configuration de terminal, ce qui consomme des groupes hydroxyle polaires. La transformation provoque la diminution de k, et l'augmentation de l'hydrophobicité (par "auto-hydrophobisation"). A l'issue de la transformation pont-terminal, des films organosiliciés poreux présentent k < 2,0, E > 6 GPa, et ne nécessitent aucun traitement chimique de surface supplémentaire pour la déshydroxylation (hydrophobicité).
Hatton Benjamin David
Landskron Kai Manfred Martin
Ozin Geoffrey Alan
Perovic Doug Dragan
Hatton Benjamin David
Hill & Schumacher
Landskron Kai Manfred Martin
Ozin Geoffrey Alan
Perovic Doug Dragan
LandOfFree
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