Method of unsticking components of micro-mechanical devices

Details Method of unsticking components of micro-mechanical devices Method of unsticking components of micro-mechanical devices

H - Electricity

01

L

H01L 21/64 (2006.01) B81B 3/00 (2006.01) G02B 26/08 (2006.01) H01H 1/00 (2006.01)

Patent

CA 2149934

A method of unsticking contacting elements (11, 17) of a micro-mechanical device (30). The device is exposed to either a low surface tension liquid with a surfactant (32) or to a supercritical fluid (62) so as to avoid damage to fragile components of the device (30). The exposure conditions are controlled so as to provide optimum results without damage to the device.

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