Method of vapor deposition

Details Method of vapor deposition Method of vapor deposition

H - Electricity

01

L

117/81

H01L 23/485 (2006.01) C23C 14/54 (2006.01)

Patent

CA 1056658

METHOD OF VAPOR DEPOSITION Abstract of Disclosure A method of vapor depositing a material onto a substrate results in improved substrate step coverage by the material while keeping the substrate clean by minimizing the evaporation of contaminants onto the surface of the substrate. The method comprises depositing a first layer of material onto the substrate, while the substrate is at a first temperature; heating the substrate to a higher temperature; and then depositing a second layer of said material on said first layer while maintaining the substrate at the higher temperature. - 1 -

218545

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