G - Physics – 09 – F
Patent
G - Physics
09
F
345/9
G09F 9/30 (2006.01) G02F 1/1362 (2006.01) H01L 21/84 (2006.01) H01L 29/786 (2006.01) G02F 1/1335 (2006.01)
Patent
CA 2002305
ABSTRACT OF THE DISCLOSURE Method for producing a display screen with a matrix of transistors provided with ah optical mask. This method consists of depositing on a substrate (100) a layer of black polyimide (102) absorbing the visible light and followed by a layer of photosensitive resin, of insolating the resin through a mask masking the channels of the transistors to be embodied, of eliminating the zones insolated with the resin and the sub-adjacent zones of the polyimide, of depositing an ITO layer (106) on the unit, of eliminating the rest of the resin and the ITO surmounting said resin so as to form the drains/sources of the transistors, of successively depositing a layer of hydrogenated amorphous silicon (110), a layer of silicon nitride (112) and a layer of aluminium (114), then of photoengraving the stack of these layers so as to form the grid of the transistors, and finally to render passive the unit with a layer of silicon (116). Figure 2-E. B 9809.C /LC
Lebrun Hugues
Vinouze Bruno
France Telecom Etablissement Autonome de Droit Public
Goudreau Gage Dubuc
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